Epiel JSC, Russia, 124460, Moscow, Zelenograd, Academician Valiev st., 6, bld. 2; National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Research Engineer, Epiel JSC (Russia, 124460, Moscow, Zelenograd, Academician Valiev st., 6, bld. 2)