National Research University of Electronic Technology, Moscow, Russia
Dr. Sci. (Eng.), Prof., Director of the Institute of Advanced Materials and Technologies, Vice-Rector for Research, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Moscow, Russia
Student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Moscow, Russia
Engineer of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)