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Nikita M. Somov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); RPC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
PhD student of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Process Engineer of the Plasma Chemical Processes Section of the Pilot Production, RPC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Ilya V. Potapenko

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Technician of the Plasma Chemical Processes Section of the Pilot Production, SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Vitaly P. Bondarenko

Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)
Сand. Sci. (Eng.), Head of the Laboratory of Materials and Structures of Nanoelectronics, Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)

Eugene B. Chubenko

Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)
Сand. Sci. (Eng.), Leading Researcher of the Laboratory of Materials and Structures of Nanoelectronics, Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)

Nikita L. Grevtsov

Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)
PhD student of the Micro- and Nanoelectronics Department, Junior Scientific Researcher of the Laboratory of Materials and Structures of Nanoelectronics, Belarusian State University of Informatics and Radioelectronics (Belarus, 220013, Minsk, Petrus Brovka st., 6)
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