National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Deposition Laboratory, Angstrem JSC (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3)