engineer of the JSC «Angstrem» (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, str. 3), PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
phD of technical sciences, docent of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Quantum Physic and Nanoelectronic Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD of physico-mathematical sciences, associate professor of the Quantum Physic and Nanoelectronic Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1