Persons
Lysenko Aleksandr Pavlovich
Kanevskiy Vladimir Evgenevich
Belov Aleksandr Georgievich
Belova Irina Mikhaylovna
scientific officer of Institute of Nanotechnology Microelectronics, Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky pr., 32А), PhD student of Microelectronics and Microsystems Department, National Research University of Electronic Technology, a joint Department with the SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)