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Proceedings of universities. Electronics: Electronics

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Alexandr S. Musatkin

National Research University of Electronic Technology, Moscow, Russia
Engineer of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer of the “Laboratory of Micro Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Nataliya L. Lagunovich

Affiliate Research & Design Center “Belmicrosystems” of JSC “INTEGRAL”–“INTEGRAL” holding managing company, Belarus, Minsk
Cand. Sci. (Eng.), Leading Engineer, Affiliate Research & Design Center “Belmicrosystems” of JSC “INTEGRAL”–“INTEGRAL” holding managing company (Belarus, 220108, Minsk, Korzhenevskii st., 12)

Ilya D. Evsikov

National Research University of Electronic Technology, Russia, Moscow
Engineer of the Center for Collective Use “Microsystem Technology and Electronic Component Base”, PhD student of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Anton O. Shakin

St. Petersburg Institute of Precision Mechanics and Optics (Technical University)

Nikita N. Karasev

St. Petersburg Institute of Precision Mechanics and Optics (Technical University)
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