student of the Integrated Electronics Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), junior researcher, «AS & PP» Limited Liability Company (Russia, 124460, Moscow, Zelenograd, Panfilovskiy pr., 10)
Doctor of technical sciences, professor of the Micro- and Nanoelectronics Department, National Research Nuclear University (Russia, 115409, Moscow, Kashirskoye shosse, 31)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Electronics Engineer of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)