Persons

The results of investigation and development of the characteristics of the micromirror element, driven by a thermal microactuator, have been presented. It has been shown that for calculating the micromirror element deflection it is crucial to take into consideration the temperature distribution along the element length. The superheat temperature calculation has been executed, the effective superheat temperature has been determined, as well as the comparison with the experimental data has been performed.

• Counter: 1412 | Comments : 0