Persons

Epitaxial processes on large diameter substrates are characterized by defective formation of the peripheral areas due to plastic deformation. The formation of zones of plastic deformation depends on the distribution of temperature stress and method of heating and laying the substrate in the reactor. The mathematical models for calculating the thermomechanical tension on the substrate by its radius and thickness have been presented. The research of the influence the substrate holder socket design and method of supporting the substrate on its resistance and stiffness has been executed. The influence of gas dynamic characteristics of the technological process on the quality of epitaxial structures has been considered. Presented results the computer modeling gas-dynamic characteristics of the flow in the epitaxial reactor has been executed. Three types of slotted reactor: prismatic, diffuser and with a elongated substrate holder have been researched. Developed the scientific-technical recommendations by design reactor have been. Using the results of the research were developed epitaxial equipment ETM 150. The results of research of epitaxial structures have been presented. The determining factor in the formation of the plastic deformations are tangential tension from the temperature field along the radius of the substrate. For large-diameter substrates it is advantageous to use the substrate holder with flat socket.

• Counter: 2020 | Comments : 0