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Sukhanov Evgeniy Sergeevich

Chilikina Tatyana Dmitrievna

Yulia V. Nazarkina

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Senior Lecturer, Junior Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nazarkin Mikhail Yurevich

Aleksey A. Dronov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, Vice-Rector for Scientific Work, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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