National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Technologist of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Technologist, “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)