Persons

Evgeny V. Konyukhov

National Research University of Electronic Technology, Moscow, Russia
Applicant of the Institute of System and Software Engineering and Information Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Elena S. Kuznetsova

“Submicron Research Institute” JSC, Moscow, Russia; National Research University of Elec-tronic Technology, Moscow, Russia
Leading Design Engineer, “Submicron Research Institute” JSC (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 2), PhD student of the Institute of Micro-Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nikita M. Zhilo

National Research University of Electronic Technology, Moscow, Russia
Engineer of the Institute of Biomedical Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Evgeny B. Kolesnikov

Novomoskovsk Institute (branch) of Dmitry Mendeleev University of Chemical Technology of Russia, Novomoskovsk, Russia
Cand. Sci. (Eng.), Аssoc. Prof. of the Power Supply of Industrial Enterprises Department, Novomoskovsk Institute (branch) of Dmitry Mendeleev University of Chemical Technology of Russia (Russia, 301665, Tula region, Novomoskovsk, Druzhba st., 8)

Alexander A. Baranov

Central Scientific-Research Institute of Chemistry and Mechanics, Moscow, Russia
Cand. Sci. (Eng.), Head of the Laboratory, Central Research Institute of Chemistry and Mechanics (Russia, 115487, Moscow, Nagatinskaya st., 16a)