Persons
Vladimir S. Petrov
JSC Pluton (Russia, 105120, Moscow, Nizhnyaya Syromyatnicheskaya st., 11)
Cand. Sci. (Eng.), Head of the Vacuum Technology Laboratory, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Dr. Sci. (Eng.), Assoc. Prof. of the Nano- and Microelectronics Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)
Engineer of the Information and Measuring Equipment and Metrology Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)
Dr. Sci. (Eng.), Prof., First Vice-Rector, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)