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Vitaly D. Kovalev

Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Head of the Physico-Analytical Research Group, Angstrem JSC (Russia, 122460, Moscow, Zelenograd, Shokina Square, 2, bld. 3)

Andrey M. Sokolov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer-Technologist of the Deposition Laboratory, Angstrem JSC (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3)

Alexandra A. Konstantinova

“NM-Tech” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6
Project Support Specialist, “NM-Tech” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6)

Vasily V. Korolev

“NM-Tech” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6
Head of the Design Automation Department, “NM-Tech” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6)

Vyacheslav S. Kalashnikov

“NM-Tech” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6
Cand. Sci. (Eng.), Head of the CAD Development and Advanced Development Department, “NM-Tech” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnayaprwy, 6)
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