Persons
Панов Михаил Федорович
Dr. Sci. (Eng.), Prof., Head of the Micro- and Nanoelectronics Department Saint Petersburg Electrotechnical University «LETI» (Russia, 197376, St. Petersburg, Professor Popov st., 5)
Levin Denis Dmitrievich
Поликарпов Юрий Александрович
Cand. Sci (Eng.), Researcher of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Leading Engineer of the Bauman Moscow State Technical University (Russia, 105005, Moscow, 2-ya Baumanskaya, 5, bld. 1)