Cand. Sci. (Phys.-Math.), Senior Engineer, Shared Facilities Center «MST&ECB», National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Russia, 124527, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Phys.-Math.), Assoc. Prof., Director, Center for Collective Use “Microsystem Technology and Electronic Component Base”, National Research University of Electronic Technology (Russia, 124527, Moscow, Zelenograd, Shokin sq., 1)