Persons
Portnov Evgeniy Mikhaylovich
PhD student of the Institute of System and Software Engineering and Computer Science, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Magerramov Rafael Vagifovich
Dr. Sci. (Eng.), Prof., Director of the Institute of of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)