phD of technical sciences, docent of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Microdevices and Control systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Master Degree Student of the Quantum Physics and Nanoelectronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)