Persons
PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Prof. of the Microelectronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1).
PhD student of the Solid State Physics Department, Saratov State University (Russia, 410012, Saratov, Astrakhanskaya str., 83)
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Solid State Physics Deparment, Saratov State University (Russia, 410012, Saratov, Astrakhanskaya str., 83)
deputy director for Educational Activities of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (124498, Russia, Moscow, Zelenograd, Shokin sq., 1)