Publication of the journal

The section is currently being updated

The advances in semiconductor integrated technology and transition to nanometer resolution in lithography process have given rise to semiconductor field emission structures development. However, nowadays the suite of field emission devices technology has got neither large-scale manufacturing application nor commercialization due to their short useful life and insufficient operational stability. In this work, a comparative analysis of the significant results obtained to date in the development of semiconductor field emission devices with a nanoscale conduction channel is carried out to evaluate the current state and prospects for further development of vacuum nanoelectronics. The technological and operational problems of developing field emission triode structures using various semiconductor materials have been analyzed. The progress achieved in the field of integration of nanoscale field emission devices with standard CMOS transistors is shown. Possible areas of application of vacuum nanoelectronic devices are considered. The urgent tasks of this scientific industry, as well as the problems that arise in the process of introducing the element base of vacuum nanoelectronics into the development and commercialization cycle of vacuum IC technology are described.
Nikolay A. Djuzhev
National Research University of Electronic Technology, Russia, 124527, Moscow, Zelenograd, Shokin sq., 1
Ilya D. Evsikov
National Research University of Electronic Technology, Russia, 124527, Moscow, Zelenograd, Shokin sq., 1

124498, Moscow, Zelenograd, Bld. 1, Shokin Square, MIET, editorial office of the Journal "Proceedings of Universities. Electronics", room 7231

+7 (499) 734-62-05
magazine@miee.ru