For modern information, measuring and optoelectronic systems based on micro-and nanomechanical sensors of angular velocity and linear acceleration it is important to ensure their stable operation in presence of external factors. In the work the results of the study on the effect of random vibration on the characteristics experimental samples of micromechanical accelerometers (MMA), obtained using the LDS V455 vibration stand, have been presented. The dependence of the vibroacceleration on the frequency of one of the samples, intended for measurement of the acceleration in the range of up to ±1.2 g, has a noticeable shift from its given profile. Therefore, to determine the causes of the discrepancy, the design of the sensing element (CHE) MMA, the effect of random vibration on it, the calculations and simulation in the ANSYS program have been performed. The calculations and simulation have been executed in the ANSYS program. The deformation e of this MMA along the z axis of sensitivity and capacitance changes under the influence of acceleration and random vibration along the X , Y and Z axes have been determined taking into account the crystallographic orientation of the silicon-CHE material. When performing the calculations and modeling, the influence of the crystallographic orientation, used for manufacturing CHE MMA as a structural material of silicon, has been considered, since it affects the deformation (deviation) of the rotor, which should be taken into account by designers-developers of MEMS sensors. The results of the theoretical and experimental research and computer modeling have been presented.
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