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Magnetometers based on anisotropic magnetoresistive (AMR) effect are lead in physical data, energy consumption and sensitivity. The idea of two-axis single-chip AMR transducer of magnetic field is promising. In this work, the two-axis single-chip anisotropic transducers of magnetic field based on Ni80Fe20 thin films with mixed anisotropy, developed for magnetometry navigation purposes, are considered. Their manufacturing technique and sensor characteristics studying results are described. The realized sensitivity on every axis is 1.58 mV/(Oe∙V) with be-ginning bridge unbalance ΔU = 20 mV.

Key words: anisotropic magnetoresistive effect, AMR transducer, geomagnetic field
Published in: MICRO- AND NANOSYSTEM TECHNOLOGY
Bibliography link: Baranov А. А., Grabov A. B., Obizhaev D. Yu., Zhukova S. A. Two-axis single-chip AMR transducer of magnetic field. Proc. Univ. Electronics, 2023, vol. 28, no. 4, pp. 500–508. https://doi.org/ 10.24151/1561-5405-2023-28-4-500-508. – EDN: APJFPO.

Alexander A. Baranov
Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a

Alexey B. Grabov
Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a

Denis Yu. Obizhaev
Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a

Svetlana A. Zhukova
Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a

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UDK: 681.586.78
Publication type: Scientific article
Source lang: Russian
DOI: 10.24151/1561-5405-2023-28-4-500-508
RISC id: APJFPO

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