The frequency micromechanical accelerometer (MMA) measures the acceleration, based on a change of the resonator frequency, when the acceleration is caused by the displacement of the inertial mass. Its sensitivity can be influenced by such factors as vibration noise, temperature, etc. In this study using the calculation and modeling in the ANSYS program the influence of the temperature on the natural oscillation frequency of resonators of various designs has been studied. It has been shown that in a number of studied designs of the frequency MMA resonators the frequency change ∆ f , caused by the temperature increase, is comparable and even exceeds a change of the frequency due to the acceleration effect. It has been determined that the known designs of the resonators, operating based on the oscillations of a two-fixed beam, do not ensure the stability of the oscillations natural frequency with the temperature change. The frequency, due to the temperature increase, of the resonators, working on the cantilever beam base, practically does not change. The best result from the point of view of the temperature stability has been shown by the resonator in the form of a cantilever beam with the beam resonator inside it, for which change ∆ f with an increase of temperature up to 70 °C. The study of the basic MMA construction, consisting of an inertial mass with a resonator made in the form of a cantilever beam with a beam resonator inside it has shown that the invariance of the natural oscillation frequency of this construction when the temperature increases up to 70 °C.
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