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Pin diodes are most often used as a basic element in microwave control devices, the main drawback of which is the high power loss to control the state of the device. With the appearance of MIS varicap, leakage currents in which do not exceed 10 A, it is possible to reduce the AESA control power. However, these devices have not been found for industrial use due to the temporary instability of the minimum capacitance value when the control signal is switched. The device and the principle of work of a MIS varicap with charge transfer have been described, in which this disadvantage has been eliminated and this fact allows it to be used in analog and digital microwave phase. The VFC of the VTC corresponds to the state of non-stationary depletion of the MIS structure in any connecting mode of the control signal. A model of a MIS varicap with charge transfer in the Advanced Design System program environment has been developed to calculate the capacity and the currents that flow through the varicap. It has been established that the calculated results correspond to the experimental. Modeling of a loopback phase shifter with a phase change from 0º to 90º based on the MIS varicap with charge transfer in the L -range has been carried out. Phase shifter loss was about 1 dB and control current was 28 nA at 10 V control voltage.

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