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Photolithography plays a key role in production of microelectronic components. One of critically complex elements of photolithograph is the source of the extreme ultraviolet electromagnetic radiation. Such a source could be a specialized source of synchrotron radiation - the technological storage ring complex (TSR) “Zelenograd” expected to be put into operation within the next few years. In this work, the results of numeric calculations of power and photon fluxes from various electromagnetic emitters of TSR “Zelenograd” are presented in the context of the possibility to use it for photolithography. Synchrotron radiation generated in the bending magnets of the TSR “Zelenograd” storage ring is considered at two electron beam energy values: 1.6 and 2.2 GeV. Calculations were carried out for a narrow spectral range with a wavelength of 13.5 nm and width of 0.4 nm, and for a wide spectral range - from 2 to 3 nm. For these electron beam energies the undulator parameters for generation of undulator radiation with a wavelength of 13.5 nm were calculated. Calculations were carried out with consideration to real limitations of undulators’ engineering capabilities: the minimum possible gap between the undulator poles, the maximum magnetization of its magnetic blocks. Special computer codes have been written for such kind of simulations. The results of intensity calculation of synchrotron and undulator radiation generated at TSR “Zelenograd” afford the statement about possibility to effective use its radiation as extreme ultraviolet radiation source in a photolithograph.

Key words: electron storage rings, synchrotron radiation, undulators, photolithography
Published in: Technological processes and routes
Bibliography link: Smolyakov N. V., Marchenkov N. V., Lebedev A. M., Chumakov R. G., Goncharenko M. S., Djuzhev N. A. Modeling of X-ray sources for a photolithography station at technological storage ring complex “Zelenograd”. Proc. Univ. Electronics, 2024, vol. 29, no. 3, pp. 300–309. https://doi.org/10.24151/1561-5405-2024-29-3-300-309
Financial source: The work was carried out within the framework of the state assignment of NRC “Kurchatov Institute”.

Nikolay V. Smolyakov
National Research Center “Kurchatov Institute” (Russia, 123182, Moscow, Academician Kurchatov sq., 1)

Nikita V. Marchenkov
National Research Center “Kurchatov Institute” (Russia, 123182, Moscow, Academician Kurchatov sq., 1)

Alexey M. Lebedev
National Research Center “Kurchatov Institute” (Russia, 123182, Moscow, Academician Kurchatov sq., 1)

Ratibor G. Chumakov
National Research Center “Kurchatov Institute” (Russia, 123182, Moscow, Academician Kurchatov sq., 1)

Mikhail S. Goncharenko
National Research Center “Kurchatov Institute” (Russia, 123182, Moscow, Academician Kurchatov sq., 1)

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Publication type: Scientific article
DOI: 10.24151/1561-5405-2024-29-3-300-309
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