Focusing and proper geometry of electron beams is one of the main tasks for developers of devices and installations with their use. The most common electron beam focusing systems are built using magnetic lenses. In this work, the developed multi-channel digital control system for the current in magnetic lenses is presented that allows for precise and stable control over the electron beam focusing process and maintaining its proper geometry. The scanning electron microscope 09-IOE-200 (MREM-200) was used as the test object, where the digital control system for electron beam focusing was installed. The obtained high-quality photographs contain no artifacts that arise in cases of unstable electron beam focusing or distortion of its proper geometry. The original circuit design using an accessible component base and software opens up wide opportunities for further modernization of the developed multi-channel system or its adaptation to new tasks.
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Key words:
scanning electron microscope, magnetic lenses, digital-to-analog converter, analog-to-digital converter, electron beam focusing, microcontroller, digital current control, magneto-optics
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Published in:
ELECTRONIC ENGINEERING
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Bibliography link:
Silaev I. V., Kazmiruk V. V., Bragin A. V., Radchenko T. I. Digital control system for the electron optics of a scanning electron microscope. Izv. vuzov. Elektronika = Proc. Univ. Electronics. 2026;31(1):46–57. (In Russ.). https://doi.org/10.24151/1561-5405-2026-31-1-46-57.
Ivan V. Silaev
North Ossetian State University named after K. L. Khetagurov, Russia, 362025, North Ossetia – Alania, Vladikavkaz, Vatutin st., 44-46
Vyacheslav V. Kazmiruk
Institute of Problems of Microelectronics Technology and Special Clean Materials of the Russian Academy of Sciences, Russia, 142432, Chernogolovka, Akademik Osipyan st., 6
Alexey V. Bragin
Bauman Moscow State Technical University, Russia, 105005, Moscow, 2nd Baumanskaya st., 5, bld. 1
Tatyana I. Radchenko
Secondary General Education School No. 26 named after I. A. Pliev, Russia, 362020, North Ossetia – Alania, Vladikavkaz, Kosta ave., 221
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