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Mikhail D. Kochergin

National Research University of Electronic Technology, Moscow, Russia
PhD student of the Institute of Nano- and Microsystem Engineering, Design Engineer of the Scientific Research Laboratory “Advanced technologies of 3D Microsystems Enclosure and Production”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Timofey P. Savchuk

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Engineer of the Scientific Research Laboratory “Technology of Nanomaterials”of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Denis V. Novikov

National Research University of Electronic Technology, Moscow, Russia
Junior Researcher of the Scientific Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Sergey S. Samsonov

National Research University of Electronic Technology, Moscow, Russia
Engineer of the Scientific Research Laboratory “Technology of Nanomaterials”of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Maria Yu. Prudnikova

National Research University of Electronic Technology, Moscow, Russia
Engineer of the Scientific Research Laboratory “Technology of Nanomaterials”of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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