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Alexey V. Tregubov

Ulyanovsk State University, Ulyanovsk, Russia
Research Associate of the S. P. Kapitsa Scientific Research Institute of Technology, Ulyanovsk State University (Russia, 432017, Ulyanovsk, Leo Tolstoy st., 42)

Andrey M. Tarasov

National Research University of Electronic Technology, Moscow, Russia
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Margarita D. Kruzhalina

National Research University of Electronic Technology, Moscow, Russia
Student, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Ekaterina S. Migunova

National Research University of Electronic Technology, Moscow, Russia Institute of Nano-technology of Microelectronics of the Russian Academy of Sciences, Moscow, Russia
Senior Lecturer of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

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