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Kostas K. Malinauskas

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Higher Mathematics-1 Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Захаров Валерий Петрович

Pavel V. Erkin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Master’s degree student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Alexander A. Galkin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Victoria V. Matesheva

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Russia, 115409, Moscow, Kashirskoe hwy., 31
Student of National Research Nuclear University MEPhI (Moscow Engineering Physics Institute) (Russia, 115409, Moscow, Kashirskoe hwy., 31)
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