Persons

Alexey A. Dronov

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Darya A. Dronova

National Research University of Electronic Technology, Moscow, Russia
Assistant of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Alexander A. Dudin

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Moscow, Russia
Cand. Sci. (Phys.-Math.), Senior Scientific Researcher of the Development and Research of Micro- and Nanosystems Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 1)

Anastasiya V. Zheleznyakova

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Assoc. Prof., Assoc. Prof. of the Materials of Functional Electronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Olga V. Volovlikova

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)