The peculiarities of technology for manufacturing the superconducting layers of 100 nm thickness based on (Bi,Pb)SrCaCuO compound with the critical temperature above 100 K have been studied. It has been shown that for manufacturing the thin layers it is critical to maintain the stoichiometric composition on the substrate surface during the process of magnetron sputtering and the superconductor crystalline structure formation at high temperature.
Рассмотрены особенности технологии изготовления слоев сверхпроводника толщиной до 100 нм состава (Bi,Pb)SrCaCuO с температурой перехода в сверхпроводящее состояние выше 100 К. Показано, что при