The information about the process of forming thin titanium oxide films by pulling out the substrates from the titanium tetraisoproproxide alcohol solution has been presented. It has been shown that the deposited titanium oxide contains a continuous film and the globules of titanium oxide formed on its surface. It has been revealed that the density and the height of the globules depend on the rate of pulling out the substrate from the solution and the relative humidity in the chamber, and the thickness of the continuous film of titanium oxide is a relatively constant value.
Ilya M. Gavrilin
National Research University of Electronic Technology, Moscow, Russia