The results of experimental studies on the activation nanolithography modes of a thin titan film by local anode oxidation (LAO) have been presented. It has been determined that the use of UV-stimulation leads to reduction of the oxide nanosized structures (ONS) geometrical sizes and is accompanied by an increase of the amplitude from 6 to 7 V and the impulses duration from 50 to 100 ms of the threshold voltage at relative humidity of 50%. The results of experimental studies on the influence of the cantilever conducting covering material and the substrate temperatures on the formed ONS geometrical sizes have been presented.