The semiconductor gas sensors with low power consumption have high sensitivity and fast response and their manufacturing technologies permit to reduce the dimensions of the transducer. In production of the semiconductor gas sensors the formation of metal-oxide sensitive layer is an important issue, in particular, the process of combination of the high-porous metal-oxide layer and integrated structures. In the paper, the results of the study on experimental transducers of the composition of gas with porous gas-sensitive layer have been presented. The gas-sensitive layer has been formed by the method of suspension inkjet printing of SnO based suspension with further annealing. The comparison of the sensitivity of the experimental samples of the gas composition transducers with the gas-sensitive layers, formed from two variants of initial suspension: based on pure SnO and SnO doped with Cr and Nb, has been performed. The dependence of variation of conductivity of the gas composition of the integrated transducer specimen on the H concentration in the air has been obtained. It has been found that the gas-sensitive layer based on SnO with Cr and Nb additives has higher sensitivity to changes in the detected gas concentration due to higher effective surface area and suppressed grains agglomeration.
1. Review on smart gas sensing technology / S. Feng, F. Farha, Q. Li et al. // Sensors. 2019. Vol. 19 (17). 22 p. URL: http://doi.org/10.3390/s19173760 (дата обращения: 10.06.2020).
2. Поломошнов С.А., Николаева А.В. Разработка конструкции газочувствительного полупроводни-кового преобразователя состава газа с использованием средств моделирования // Материалы науч.-техн. конф. «Микроэлектроника и информатика – 2017»: сб. статей. М.: МИЭТ, 2017. С. 152–157.
3. Преобразователь датчика взрывоопасных газов на диэлектрической мембране / С.А. Поломош-нов, Ю.А. Чаплыгин, В.В. Амеличев и др. // Нано- и микросистемная техника. 2005. № 10. С. 39–42.
4. Fine G.F., Cavanagh L.M., Afonja F., Binions R. Metal oxide semi-conductor gas sensors in environ-mental monitoring // Sensors. 2010. Vol. 10 (6). P. 5469–5502. URL: https://doi.org/10.3390/s100605469 (дата обращения: 23.06.2020).
5. Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration /
С. Griessler, E. Brunet, T. Maier et al. // Microelectronic Engineering. 2011. Vol. 88 (8). P. 1779–1781.
URL: https://doi.org/10.1016/j.mee.2011.02.017 (дата обращения: 23.06.2020).
6. Organometallic synthesis of ZnO nanoparticles for gas sensing: towards selectivity through nanoparticles morphology / A. Ryzhikov, J. Jonca et al. // Journal of Nanoparticle Research. 2015. Vol. 17 (280). 10 p.
URL: https:// doi.org/10.1007/s11051-015-3086-2 (дата обращения: 05.07.2020).
7. Micromachined hotplate platform for the investigation of ink-jet printed, functionalized metal oxide na-noparticles / P. Walden, J. Kneer, S. Knobelspies et al. // Journal of Microelectromechanical Systems. 2015. Vol. 24 (5). P. 1384–1390. URL: https:// 10.1109/JMEMS.2015.2399696 (дата обращения: 05.07.2020).
8. Амеличев В.В., Поломошнов С.А., Чаплыгин Ю.А. Разработка и проектирование интегральных термоэлементов // Проблемы разработки перспективных микроэлектронных систем – 2006: сб. науч. тр. / под общ. ред. А.Л. Стемпковского. М.: ИППМ РАН, 2006. С. 416–420.
9. Амеличев В.В., Годовицын И.В, Поломошнов С.А., Чаплыгин Ю.А. Оптимизация конструкции мембраны в теплодисперсионном датчике взрывоопасных газов // Изв. вузов. Электроника. 2005. № 3.
С. 50–57.
10. Peter C., Kneer J., Wollenstein J. Inkjet printing of titanium doped chromium oxide for gas sensing application // Sensor Letters. 2011. Vol. 9(2). P. 807–811. URL: https://doi.org/10.1166/sl.2011.1619 (дата обращения: 03.07.2020).
11. Khan S., Briand D. All-printed low-power metal oxide gas sensors on polymeric substrates // Flexible and Printed Electronics. 2019. Vol. 4 (1). URL: https://doi.org/10.1088/2058-8585/aaf848 (дата обращения: 05.07.2020).
12. Кривецкий В.В., Румянцева М.Н., Гаськов А.М. Химическая модификация нанокристалличе-ского диоксида олова для селективных газовых сенсоров // Успехи химии. 2013. Т. 82 (10). С. 917–941.
13. Liu H., Zhang L., Li K. H. H., Tan O. K. Microhotplates for metal oxide semiconductor gas sensor ap-plications - towards the CMOS-MEMS monolithic approach // Micromachines. 2018. Vol. 9 (11). 24 p.
URL: https://doi.org/10.3390/mi9110557 (дата обращения: 10.07.2020).
14. Abdeslam A.A., Fouad K., Khalifa A. Design and optimization of platinium heaters for gas sensor ap-plications // Digest Journal of Nanomaterials and Biostructures. 2020. Vol. 15(1). P. 133–141.
15. Electrohydrodynamic inkjet printing of Pd loaded SnO2 nanofibers on a CMOS micro hotplate for low power H2 detection / H. Wu, J. Yu, R. Cao et al. // AIP Advances. 2018. Vol. 8 (5). 7 p.
URL: https://doi.org/10.1063/1.5029283 (дата обращения: 10.07.2020).
16. Kang J.G., Park J.S., Lee H.J. Pt-doped SnO2 thin film based micro gas sensors with high selectivity to toluene and HCHO // Sensors. Actuators B Chemical. 2017. Vol. 248. P. 1011–1016.
URL: https://doi.org/10.1016/j.snb.2017.03.010 (дата обращения: 15.07.2020).
17. Kim I., Seo K.W., Kim I. Ultra-thin filmed SnO2 gas sensor with a lowpower micromachined hotplate for selective dual gas detection of carbon monoxide and methane // Proc. of the 2017 Eleventh International Conference on Sensing Technology (ICST). Sydney, Australia, 2017. 5 p.
18. Mask-less deposition of Au-SnO2 nanocomposites on CMOS MEMS platform for ethanol detection /
S. Santra, A.K. Sinha, A. De Luca et al. // Nanotechnology. 2016. Vol. 27(12). 9 p. URL: https://doi: 10.1088/0957-4484/27/12/125502 (дата обращения: 20.07.2020).
19. Micro-machined gas sensor array based on metal film micro-heater / Y. Mo, Y. Okawa, M. Tajima et al. // Sensors Actuators B Chemical. 2001. Vol. 79. P. 175–181. URL: https:// doi.org/10.1016/S0925-4005(01)00871-1 (дата обращения: 20.07.2020).