The process of the film oxidation of graphene, containing one and several layers, under the influence of UV irradiation structure in water vapor has been investigated. The regularity has been revealed and the difference in topography variation, as well as in the optical properties of grapheme, having a different number of layers, has been demonstrated. The possibility of the surface functionalization with modification of the energy structure of graphene has been revealed. The differences in the mechanisms of UFO oxidation of monolayer, multilayer and few-layered graphene have been analyzed. The correlation of the topographic defects of the graphene material properties and of the structural defects, observed on Raman scattering of light spectra, has been demonstrated.