1561-5405 10.24151/1561-5405 Proceedings of Universities. Electronics Scientifical and technical journal "Proceedings of Universities. Electronics" Научно-технический журнал «Известия высших учебных заведений. Электроника» 1561-5405 2587-9960 National Research University of Electronic Technology Национальный исследовательский университет "Московский институт электронной техники" 10.24151/1561-5405-2023-28-1-49-58SPAORO546.57-022.532.: 620.181.4Технологические процессы и маршрутыFeatures of the nanoparticles and binary nanoalloys formation during thermal evaporation and condensation on an inert surface in vacuumОсобенности формирования наночастиц и бинарных наносплавов при термическом испарении и конденсации на инертной поверхности в вакуумеГромов Дмитрий ГеннадьевичГромовДмитрий ГеннадьевичGromovDmitry G.Dmitry G. GromovДубков Сергей ВладимировичДубковСергей ВладимировичDubkovSergey V.Sergey V. DubkovСавицкий Андрей ИвановичСавицкийАндрей ИвановичSavitskiyAndrey I.Andrey I. SavitskiyГаврилов Сергей АлександровичГавриловСергей АлександровичGavrilovSergey A.Sergey A. GavrilovNational Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)17042026Том. 28 №14958http://ivuz-e.ru/en/issues/1-_2023/features_of_the_nanoparticles_and_binary_nanoalloys_formation_during_thermal_evaporation_and_condens/http://ivuz-e.ru#

In recent times, plasmonic effects are widely used to cover the different application purposes. Due to plasmonic effects the nanoparticles enhance some phenomena, such as Raman scattering, photocatalysis, and photogeneration. The understanding of nanoparticles and nanoalloys formation features makes it possible to obtain their specific composition and structure. In this work, several features of the Ag, Au nanoparticles and Ag-Cu, Au-Cu, Cu-Rh binary nanoalloys formation by thermal evaporation, condensation and heating on an inert surface in vacuum are shown. It is found by atomic force microscope investigation that rapid changes in the initial Ag array take place at a low temperature of 75–100 °C, and after the array enters a metastable state. It was found that the impact of the electron beam of a transmission electron microscope on the initial condensate leads to the migration of nanoparticles and their fusion despite their crystalline state. The difference in the formation of Ag-Cu, Au-Cu and Cu-Rh nanoalloys is demonstrated. The phase formation deviation from phase equilibrium diagram of bulk materials, associated with the size effect, is also demonstrated. It has been established that the considered features of the nanoparticles and nanoalloys formation are associated with the size effect of melting-point depression and existence of liquid layer of a certain thickness on the solid phase surface, which is in equilibrium with the solid phase.

В последнее время плазмонные эффекты широко исследуются для различных применений. Благодаря плазмонным эффектам наночастицы усиливают некоторые явления, такие как комбинационное рассеяние света, фотокатализ, фотогенерация. Понимание особенностей формирования наночастиц и наносплавов позволяет добиться их определенного состава и структуры. В работе показаны особенности формирования наночастиц Ag, Au и бинарных наносплавов Ag-Cu, Au-Cu, Cu-Rh путем термического испарения, конденсации и нагрева на инертной поверхности в вакууме. Посредством атомно-силовой микроскопии обнаружено, что быстрые изменения в исходном массиве наночастиц Ag происходят при низкой температуре (75-100 °C), после чего массив переходит в метастабильное состояние. Выявлено, что воздействие электронного луча просвечивающего электронного микроскопа на исходный конденсат приводит к миграции наночастиц и их слиянию, несмотря на их кристаллическое состояние. Продемонстрировано различие в образовании наносплавов Ag-Cu, Au-Cu и Cu-Rh. Показано отклонение в образовании фаз от диаграммы фазовых равновесий объемных материалов, обусловленное размерным эффектом. Установлено, что рассмотренные особенности формирования наночастиц и наносплавов связаны с размерным эффектом снижения температуры плавления и наличием на поверхности твердой фазы слоя жидкости определенной толщины, находящегося в равновесии с твердой фазой.

nanoparticlenanoalloymeltingcoalescencegoldsilvercopperthermal evaporationnanoparticlenanoalloymeltingcoalescencegoldsilvercopperthermal evaporationработа выполнена при финансовой поддержке РНФ (проект № 21-19-00761). Благодарности: работа выполнена с использованием оборудования и при содействии специалистов Центра коллективного пользования «Диагностика и модификация наноструктур и нанообъектов» МИЭТ, Центра коллективного пользования НИИ физических проблем им. Ф. В. Лукина, Института нанотехнологий микроэлектроники РАН.the work has been supported by the Russian Science Foundation (project no. 21-19-00761). Acknowledgments: the work has been carried out using equipment and with the assistance of specialists from Center for collective use “Diagnostics and Modification of Microstructures and Nanoobjects” (National Research University of Electronic Technology), Center for collective use of Scientific Research Institute of Physical Problems named after F. V. 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