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Creation of UV spectrum sensors with a narrow and easily variable sensitivity range is an urgent problem for solving the problems of UV radiation detection and determining its spectral composition. This problem can be solved by using anodic titanium oxide (ATO) nanotube arrays as resistive photodetectors. In this work, the dependences of the quantum efficiency spectra of ATO nanotube arrays on the anodic oxidation time and on heat treatment temperature are described. ATO nanotube arrays were obtained by anodic oxidation of titanium foil in fluorine containing ethylene glycol based electrolyte in potentiostatic mode. The results of ATO nanotubes’ nanostructure morphology investigation by scanning electron microscopy and of the phase composition of samples and luminescence intensity investigation by Raman light scattering as a function of anodic oxidation time and post-treatment temperature are presented. The results of quantum efficiency measurements of ATO nanotube arrays obtained by photocurrent spectroscopy are given. It has been established that the maximum efficiency for the wavelength of 360 nm is characteristic for samples formed within 1 hr and heat treated at 400 °C, and the maximum quantum efficiency located at wavelengths less than 300 nm is characteristic for samples anodically oxidised for 5 min and treated at 350 °C.

Key words: nanotubes, titanium oxide, optical sensor, quantum efficiency, UV spectroscopy, spectrum analyzer
Published in: ELECTRONICS MATERIALS
Bibliography link: Butmanov D. D., Prudnikova M. Yu., Samsonov S. S., Novikov D. V., Savchuk T. P., Dronova D. A. Investigation of the dependence of structure, composition and photoelectrochemical properties of anodic titanium oxide nanotubes on the time of synthesis and temperature of subsequent treatment. Izv.vuzov. Elektronika = Proc. Univ. Electronics. 2025;30(4):411–421. (InRuss.).https://doi.org/10.24151/1561-5405-2025-30-4-411-421.

Danil D. Butmanov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Maria Yu. Prudnikova
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Sergey S. Samsonov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Denis V. Novikov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Timofey P. Savchuk
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

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Information about the publication

UDK: 621.383.4
Publication type: Scientific article
Source lang: Russian
DOI: 10.24151/1561-5405-2025-30-4-411-421
RISC id: CHBRET

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